V2EX van der pauw method

Van der Pauw Method

Definition / 释义

Van der Pauw method:一种用于测量薄片状样品(常见为薄膜或半导体片)片电阻(sheet resistance)以及在配合磁场时测量霍尔系数/载流子浓度的电学测试方法。其特点是:样品形状可不规则,但通常要求样品厚度均匀、各向同性、无孔洞,并在样品边缘设置四个小欧姆接触点进行测量。
(也常译作“范德保方法/范德鲍法”。)

Pronunciation / 发音

/vn dr pa mθd/

Etymology / 词源

该术语源自荷兰物理学家 Leo J. van der Pauw 的姓氏与 “method(方法)” 组合而成。van der Pauw 在 20 世纪中期提出这一测量方案,使得在不方便加工成标准条形(bar)的样品上也能较准确地得到片电阻与相关电输运参数,因此在半导体工艺与薄膜表征中被广泛采用。

Examples / 例句

We measured the sheet resistance of the ITO film using the Van der Pauw method.
我们用范德保方法测量了 ITO 薄膜的片电阻。

Although the sample had an irregular shape, the Van der Pauw method still provided reliable resistivity and Hall data after areful contact placement.
尽管样品形状不规则,只要谨慎布置接触点,范德保方法仍能给出可靠的电阻率与霍尔数据。

Related Words / 相关词

Literary Works / 文献与著作

  • van der Pauw, L. J. “A method of measuring the resistivity and Hall coefficient on lamellae of arbitrary shape.” Philips Research Reports (1958).(提出该方法的经典原始论文)
  • Dieter K. Schroder, Semiconductor Material and Device Characterization.(半导体材料与器件表征教材,常包含范德保测量章节)
  • Eugene Hecht?(不相关)→ 更常见的是相关表征/输运类教材与手册会系统介绍该方法,例如薄膜与电输运测量专著中对 Van der Pauw 技术的应用说明。
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